JPS63102769U - - Google Patents
Info
- Publication number
- JPS63102769U JPS63102769U JP19608086U JP19608086U JPS63102769U JP S63102769 U JPS63102769 U JP S63102769U JP 19608086 U JP19608086 U JP 19608086U JP 19608086 U JP19608086 U JP 19608086U JP S63102769 U JPS63102769 U JP S63102769U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor film
- compound semiconductor
- susceptor
- substrate
- forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 4
- 150000001875 compounds Chemical class 0.000 claims 6
- 239000004065 semiconductor Substances 0.000 claims 6
- 239000002184 metal Substances 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 230000000737 periodic effect Effects 0.000 claims 1
- 239000002994 raw material Substances 0.000 claims 1
- 238000001947 vapour-phase growth Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19608086U JPS63102769U (en]) | 1986-12-19 | 1986-12-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19608086U JPS63102769U (en]) | 1986-12-19 | 1986-12-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63102769U true JPS63102769U (en]) | 1988-07-04 |
Family
ID=31154567
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19608086U Pending JPS63102769U (en]) | 1986-12-19 | 1986-12-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63102769U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017109891A (ja) * | 2015-12-15 | 2017-06-22 | 株式会社豊田中央研究所 | 化合物単結晶製造装置、及び化合物単結晶の製造方法 |
-
1986
- 1986-12-19 JP JP19608086U patent/JPS63102769U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017109891A (ja) * | 2015-12-15 | 2017-06-22 | 株式会社豊田中央研究所 | 化合物単結晶製造装置、及び化合物単結晶の製造方法 |
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